Even with large diameters (flatness of 0.2mm or less with 300mm), high rigidity minimizes warpage and prevents the cracking caused by the deposition film, allowing a substantial increase in film thickness tolerance.

Protects the heater stage during the process chamber adjustment. With its excellent flatness and shape stability, it can be used consistently for various types of absorption heaters. High chemical & heat resistance and low particles enables long lifetime.

Due to its high especially electric conductivity, it enables rapid temperature increase from room temperature to 1,700 degrees. Combined with its high durability, it has excellent heating ability in air or reactive gas atmospheres.

Offers the best solution as a lineupion jig for GaN devices.
This is the Ultra high-purity SiC, which can be used without CVD coating.

This is an ultra high-purity coating of Bridgestone's SiC PureBeta, offering the highest quality material used in an extremely high temperature applications (annealing, SIMOX, etc.)

It has excellent plasma resistance, durability and long life, as well as the ability to reduce Coo (cost of owner ship).

As an optical film, it can be used in the deposition of SiO2 film for laser optical waveguides. It can also be utilized as a protection film for various mechanical applications. The high conductivity greatly contributes to the efficiency in DC spattering.